Bidirectional biomimetic flow sensing with antiparallel and curved artificial hair sensors

• Claudio Abels,
• Antonio Qualtieri,
• Toni Lober,
• Alessandro Mariotti,
• Lily D. Chambers,
• Massimo De Vittorio,
• William M. Megill and
• Francesco Rizzi

Beilstein J. Nanotechnol. 2019, 10, 32–46, doi:10.3762/bjnano.10.4

• curve which is earlier than the antiparallel cantilevers at 75%. The antiparallel artificial hair sensor better compensates for temperature changes than the single sensor. Conclusion: This work demonstrated the successive improvement of the bidirectional sensitivity, that is, improved temperature

• × 100 μm × 0.7 μm) that demonstrated bidirectional sensitivity to nitrogen flow. Equipped with a 80 μm long nickel–chrome (80/20) piezoresistor (strain gauge), the artificial hair sensor was sensitive to nitrogen flow along both cantilever directions. However, the strain gauge resistance revealed an

• . Voltage signals below and above the potential difference of the Wheatstone bridge circuit in its equilibrium (offset) state are directly related to the direction of the flow. The antiparallel artificial hair sensor is equipped with two bent cantilevers and has a squared footprint of 2.5 mm2. The